TJA-6

6 Inch Teflon Cassette/PFA Cassette

Material:
Teflon/PFA
Dimensions:

143.3(L) x 177.8(W) x 171.4(H)mm

Capacity:
25 pcs
Net Weight:
1.1 KG
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Product Introduction

Product Description

6 Inch Teflon Cassette/PFA Cassette TJA-6

The 6 Inch Teflon Cassette, also known as a PFA Cassette, is engineered for semiconductor manufacturing processes involving strong acids and alkalis. Designed for cleanroom environments, this teflon cassette ensures stable wafer handling and reliable performance even under harsh chemical conditions.

Key Features

  • Exceptional Chemical & High-Temperature Resistance
    Made from high-performance PFA material, the TJA-6 PFA cassette withstands temperatures up to 200–220°C. It offers excellent resistance to strong acids, hydrofluoric acid (HF), and strong alkaline solutions, helping maintain wafer integrity during chemical processing and transfer.
  • Optional Ergonomic Handles
    Available with Teflon handles or an optional M-shaped handle (TJA-8-H) to improve ease of operation and safe wafer loading and unloading.
  • Customizable & Traceable Design
    Supports laser engraving and optional RFID integration for enhanced asset management, process control, and traceability in semiconductor fabrication facilities.

Applications

The Teflon Cassette TJA-6 is widely used in semiconductor and microelectronics industries, particularly in wet bench processes, chemical etching, cleaning, and other high-precision wafer processing applications requiring superior chemical resistance.

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