12 Inch PFA Cassette/Teflon Cassette
350(L) x 180(W) x 320(H)mm
Product Introduction
Product Description
12 Inch PFA Cassette/Teflon Cassette TJA-12
The 12 Inch PFA Cassette, also known as a Teflon Cassette, is engineered for semiconductor wet processes involving strong acids and alkaline chemicals. Designed for advanced cleanroom environments, this PFA cassette ensures stable wafer handling and reliable performance in harsh chemical conditions.
Key Features
Superior Chemical & Heat Resistance
Manufactured from high-performance PFA material, the Teflon cassette TJA-12 withstands temperatures up to 200–220°C. It offers exceptional resistance to hydrofluoric acid (HF), concentrated acids, and strong bases, protecting wafer integrity during chemical transfer and processing.
Optional Ergonomic Handles
Available with Teflon handles or an optional M-shaped handle (TJA-8-H) to improve operational safety and ease of wafer loading and unloading.
Customizable & Traceable Design
Supports laser engraving and optional RFID integration to enhance asset tracking, process traceability, and production management efficiency.
Applications
The 12 Inch PFA Cassette / Teflon Cassette is widely used in semiconductor and microelectronics manufacturing, particularly in wet bench cleaning, chemical etching, and precision wafer processing applications that require high chemical resistance and strict contamination control.
