6 Inch Teflon Cassette | PFA Cassette | TJF-A6
143.3(L) x 177.8(W) x 171.4(H)mm
Product Introduction
Product Description
6 Inch Teflon Cassette | PFA Cassette | TJF-A6
The 6 inch teflon cassette TJF-A6, also known as a PFA cassette, is a high-performance teflon cassette designed for semiconductor manufacturing processes involving strong acids and alkaline chemicals. Engineered for cleanroom environments, this teflon cassette ensures stable wafer handling and reliable performance under harsh chemical conditions.
Exceptional Chemical Resistance｜Teflon Cassette Advantage
Manufactured from high-purity PFA material, this teflon cassette provides outstanding resistance to aggressive chemicals, including hydrofluoric acid (HF) and strong alkaline solutions. It can withstand temperatures up to 200–220°C, making it ideal for wet process applications and high-temperature environments.
This PFA cassette helps maintain wafer integrity and stability during chemical processing, transfer, and storage.
Ergonomic & Flexible Teflon Cassette Design
The TJF-A6 teflon cassette is designed for both performance and usability:
- Optional Teflon handles for easy operation
- M-shaped handle version (TJF-A6-M) for improved wafer loading and unloading
- Stable slot structure for precise wafer positioning
This ensures safe and efficient wafer handling in cleanroom environments.
Customizable & Traceable PFA Cassette
This teflon cassette supports advanced customization features:
- Laser engraving (QR code, serial number, logo)
- Optional RFID integration
- Enhanced traceability for wafer tracking and process control
These features improve asset management and production efficiency in semiconductor fabs.
Applications｜Teflon Cassette in Semiconductor Processing
The TJF-A6 teflon cassette is widely used in:
- Wet bench processing
- Chemical etching
- Wafer cleaning processes
- Semiconductor and microelectronics manufacturing
This PFA cassette provides a reliable, contamination-resistant solution for high-precision wafer processing environments.